Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
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Filing date
Publication date
Application filed by Mitsubishi Materials CorpfiledCriticalMitsubishi Materials Corp
Priority to JP60159975ApriorityCriticalpatent/JPS6221625A/ja
Publication of JPS6221625ApublicationCriticalpatent/JPS6221625A/ja
Publication of JPH0321453B2publicationCriticalpatent/JPH0321453B2/ja
Verfahren zur herstellung von -si-si-nh-si-sigruppen enthaltenden silazanpolymeren, verfahren zur herstellung eines siliciumcarbidenthaltenden keramischen materials und verfahren zur herstellung eines mit diesem material beschichteten gegenstands